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Facilities
Facilities
Tube furnaces for chemical vapor deposition (CVD管式炉)
Date:2018-08-14 | Visits:
16
运用Ar等惰性气体作为载气通过化学反应在目标衬底上制备
薄膜的仪器,主要用来制备拓扑二维等新型材料。
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School of Electronic Science and Engineering, Nanjing University