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RHEED (反射式高能电子衍射仪)
Date:2018-08-14 | Visits:32


该仪器可以发射出高能电子束,通过掠入射目标薄膜的表面可以监测

薄膜的结构质量。主要用作薄膜生长时的原位监控与表征。

 
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