atomic force microscope(AFM)

Semiconductor probe station

2-inch MoS2 single crystal wafer epitaxial system

Raman-PL-SHG

electron beam evaporation system(EBE)

Scanning electron microscope and Electron beam lithography system(SEM/EBL)

Atomic Layer Deposition(ALD)

vacuum annealing furnace

Ultra high vacuum electron beam evaporation system

Vacuum Low Temperature Testing System for Semiconductor Devices

Plasma enhanced atomic layer deposition system(PEALD)

4200 Semiconductor analyzer and PXIe-1088 chassis

Glove box with built-in multifunctional transfer platform

High vacuum molecular beam epitaxial system(MBE)

108 laboratory

scanning electron microscope(SEM)

E-beam lithography(EBL)

Inductively Coupled Plasma Etching(ICP)

Reactive Ion Etching(RIE)

UV lithography machine